Main Office: Main: 510-336-9310 Toll Free: 877-RespDyn (877-737-7396) 4110 Redwood Rd., Suite 301 Oakland, CA 94619 Colorado Office: 303-477-5261 3240 Tejon St. #201 Denver, CO 80211

Vibration Testing	Finite Element Modeling	Modal Testing	Vibration Isolation	Servo Control Analysis
Site Survey of Vibration, Noise & EMI	Acoustical Testing	Source Identification	Vibration Monitoring	Sensitivity Testing

Response Dynamics provides a broad range of vibration and acoustical engineering consulting services to the semiconductor industry, the biotech industry and other high tech industries worldwide since 1984.  We solve problems ranging from the nanometer level vibration issues on scanning electron microscopes, interferometers, and atomic force microscopes, to the centimeter level vibration issues associated with instrumenting offshore rigs for low frequency operating deflection shape analysis.

We specialize in the use of state-of-the-art digital data acquisition and analysis instrumentation as well as the use of finite element modeling techniques to provide the most cost effective solutions to a broad range of vibration and acoustic noise problems.  Our extensive experience with micro-vibration and acoustics issues in the structural dynamics of sensitive high-resolution manufacturing, testing and imaging systems, make us leaders in the field of sub-micron and nanometer technology.

We provide consulting services to numerous companies in the development of wafer fabrication and metrology equipment, biotech test and imaging systems, and other sensitive devices. This commonly involves providing assistance at several points along the product development cycle.  Firstly, we provide assistance and guidance in the development of the conceptual and detailed design (often using finitie element modelling) . Once the prototype has been built, we perform measurements and analysis of the dynamics response of these systems to their internal sources (such as X-Y stage stopping transients) and external sources (such as floor vibration and acoustics noise). In addition, determination of system resonances by modal testing and analysis often provides critical design information. If necessary, the design is then improved by making appropriate changes in structural design, stage control, or vibration isolation. After the first product hardware has been built, we perform vibration sensitivity testing to determine the specification allowable levels of facilty vibration (and acoustic noise) for the systems installation. We then perform site evaluation measurement to verify that the proposed installation site (in the end-user's facility) provides an acceptable vibration and acoustic noise environement for the successful operation of the sensitive system.  If facility problems are identified then we work with the facility owners to identify and solve the problem or to find a suitable alternative site for the system. 

Solving vibration problems requires more than just the right test equipment.  It also requries testing methodologies and insight developed with years of seasoned experience.  We attack a vibration, imaging, or acoustical problem by characterizing the essentials of the disturbance signal.  We then address both the dynamics of the structure and signal processing of the tool as a whole to identify the key elements of the structure that require stiffness, damping, or mass distribution improvements.  Our experience allows us to be both efficient and thorough, minimizing troubleshooting tool time and prototype iterations.

For semiconductor wafer fabs and other end users of vibration sensitive equipment, Response Dynamics performs site evaluation measurements, including vibration site surveys for new and existing critical equipment.  The site evaluation measurements involve making floor vibration, stray magnetic field and acoustic noise measurements to determine whether the proposed locations are suitable for adequate operation of critical equipment.  If a facility is found to have excessive floor vibration, acoustic noise, or stray magnetic field, then we work closely with the facility owners to identify the most cost-effective solution.   The solution may involve reduction/isolation of the disturbance source, active cancellation of the disturbance at the sensitive tool, modification of the floor system, or tool improvement (such as with tuned mass dampers).

Some of the metrology equipment that we have worked on are SEM tool, ELF system, FIB tool, TEM tool, AFM (atomic force microscope) system, profilometer, wafer stepper, interferometer, electron microscope, CD SEM tool, elipsometer, and SPM tools which are manufactured by the companies such as KLA-Tencor, Veeco, Applied Materials, Rudolf Technologies, Nikon, Wyko, Zygo, Sensys, JEOL, Amray, Schlumberger, Thermawave, FEI, and Nanometrics.